Temperature-dependence and microscopic origin of low frequency 1/f noise in GaN/AlGaN high electron mobility transistors

We have performed low frequency 1/f noise measurements from 85 K to 450 K to investigate the energy distribution of defects in GaN/AlGaN high electron mobility transistors fabricated in three different processes. The noise is well described by the model of P. Dutta and P. M. Horn, Rev. Mod. Phys. 53, 497 (1981). A peak in the defect energy distribution is observed at ∼0.2 eV for all device types investigated, which we attribute to the reconfiguration of an oxygen DX-like center in AlGaN. An additional peak at an energy >1 eV is observed for devices grown under nitrogen-rich conditions, which we attribute to the reconfiguration energy of negatively charged nitrogen antisites.

[1]  peixiong zhao,et al.  Unified model of hole trapping, 1/f noise, and thermally stimulated current in MOS devices , 2002 .

[2]  En Xia Zhang,et al.  Process Dependence of Proton-Induced Degradation in GaN HEMTs , 2010, IEEE Transactions on Nuclear Science.

[3]  P. M. Horn,et al.  Low-frequency fluctuations in solids: 1/f noise , 1981 .

[4]  Michael Kneissl,et al.  Metastability of Oxygen Donors in AlGaN , 1998 .

[5]  Lode K. J. Vandamme,et al.  Noise as a diagnostic tool for quality and reliability of electronic devices , 1994 .

[6]  peixiong zhao,et al.  Dehydrogenation of defects and hot-electron degradation in GaN high-electron-mobility transistors , 2011 .

[7]  Christiane Poblenz,et al.  Structural Properties of GaN Buffer Layers on 4H-SiC(0001) Grown by Plasma-Assisted Molecular Beam Epitaxy for High Electron Mobility Transistors , 2004 .

[8]  Alexander A. Balandin Gate-voltage dependence of low-frequency noise in GaN/AlGaN heterostructure field-effect transistors , 2000 .

[9]  Ronald D. Schrimpf,et al.  1/f Noise in GaN HEMTs grown under Ga-rich, N-rich, and NH3-rich conditions , 2011, Microelectron. Reliab..

[10]  Mattila,et al.  Large atomic displacements associated with the nitrogen antisite in GaN. , 1996, Physical review. B, Condensed matter.

[11]  John H. Scofield,et al.  Temperature-independent switching rates for a random telegraph signal in a silicon metal–oxide–semiconductor field-effect transistor at low temperatures , 2000 .

[12]  P. Waltereit,et al.  Power performance of AlGaN-GaN HEMTs grown on SiC by plasma-assisted MBE , 2004, IEEE Electron Device Letters.

[13]  Michael S. Shur,et al.  AlGaN/GaN high electron mobility field effect transistors with low 1/f noise , 1998 .

[14]  Michael S. Shur,et al.  Low-frequency noise in GaN/AlGaN heterostructure field-effect transistors at cryogenic temperatures , 2002 .