Multi-layer CPW-based models are not readily available in commercial simulators. Therefore, a set of teststructures (inductors, resistors, capacitors, transmission lines, discontinuities,...) has been realized to fully characterize IMEC's MCM-D technology, Scaleable models have been created and implemented in a design library offering automated layout. This facilitates the design of complex circuits and reduces the chance on layout errors. The possibilities of the library are briefly demonstrated in this paper and the TaN-resistormodel and the spiral inductormodel are described in more detail. Both resistorlength and width can be easily and accurately scaled by using an RLCG transmission line model (R is the series resistance per unit length, L and C represent the series inductance and shunt capacitance per unit length). R is constant up to millimeter-wave frequencies (verified up to 50 GHz) and directly determined by the sheet-resistance and resistorwidth. L and C are determined from the measurement of a transmission line structure where the resistorlayer is replaced by metal. High-Q inductors have been realized and successfully modeled using a lumped equivalent network. A higher order model has been selected to accurately model the behaviour of the inductor above the self-resonance frequency.