论文信息 - Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4 - 字舞流文

Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4

D. J. Economou | E. Schüngel | J. Schulze | Z. Donkó | J. Booth | T. Lafleur | S. Longo | A. Derzsi | S. Brandt | I. Korolov | B. Bruneau | P. Diomede | T. Gans | A. Greb | D. O’Connell | E. Johnson