65nm node gate pattern using attenuated phase shift mask with off-axis illumination and sub-resolution assist features
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Changan Wang | Mark Mason | Robert A. Soper | Jason Lee | Sean O'Brien | Gary Zhang | Won Kim | Mark Terry | Joe Ganeshan | Robert Soper | Steven Hansen | M. Mason | S. Hansen | M. Terry | Jason Lee | Changan Wang | Gary Zhang | S. O'brien | Won-Sok Kim | J. Ganeshan
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