论文信息 - Tuning of the silicon nitride refractive index by RF sputtering power - 字舞流文

Tuning of the silicon nitride refractive index by RF sputtering power

Caldarelli | M. Iodice | M. Musto | C. Koral | A. Andreone | Carmine D’Alessandro | D. D. Maio | D. D. Luca | E. D. Gennaro | V. D. Meo | Roberto Russo | Antonio