Two-dimensional integration of a vertical-cavity surface-emitting laser and photodetectors for position sensing.

Noncontact long-range position sensing is desirable for a number of applications. We have designed and fabricated a monolithically integrated vertical-cavity surface-emitting laser (VCSEL) and p-type/intrinsic/n-type (PIN) photodetectors for optical position sensing. Calculations using the reflection from a periodic metallic corrugation as a position gauge indicate resolution in the submicron regime. High device uniformity is obtained using novel fabrication techniques. We observe a threshold current of 0.52 mA for the VCSELs and a detector responsivity of 0.38 A/W at 840 nm. The optical cross talk between VCSELs and detectors is also quantified.

[1]  Niloy K. Dutta,et al.  High power InGaAs/GaAsP/InGaP surface emitting laser , 1997 .

[2]  Niloy K. Dutta,et al.  Monolithic integration of photodetector with vertical cavity surface emitting laser , 1991 .

[3]  M. Stach,et al.  Bidirectional Optical Interconnection at Gb/s Data Rates With Monolithically Integrated VCSEL-MSM Transceiver Chips , 2006, IEEE Photonics Technology Letters.

[4]  J.S. Harris,et al.  Integrated semiconductor vertical-cavity surface-emitting lasers and PIN photodetectors for biomedical fluorescence sensing , 2004, IEEE Journal of Quantum Electronics.

[5]  Jesper Berggren,et al.  Fabrication and performance of 1.3-μm vertical-cavity surface-emitting lasers with InGaAs quantum well active regions grown on GaAs substrates , 2004, SPIE Photonics Europe.

[6]  J. Z. Zhu,et al.  The finite element method , 1977 .

[7]  Hong Q. Hou,et al.  Monolithic integration of In0.2Ga0.8As vertical-cavity surface-emitting lasers with resonance-enhanced quantum well photodetectors , 1996 .

[8]  Kazuhisa Yanagisawa,et al.  Optical micro encoder with sub-micron resolution using a VCSEL , 1998 .

[9]  J. Kong.  Electromagnetic Wave Theory , 1986 .

[10]  P. Leisher,et al.  Etch damage and deposition repair of vertical-cavity surface-emitting lasers , 2006 .

[11]  J. Cheng,et al.  Quasi-planar monolithic integration of high-speed VCSEL and resonant enhanced photodetector arrays , 1999, IEEE Photonics Technology Letters.

[12]  J. Scott,et al.  Monolithic vertical-cavity laser/p-i-n photodiode transceiver array for optical interconnects , 1998, IEEE Photonics Technology Letters.

[13]  Kent D. Choquette,et al.  Detector-enclosed vertical-cavity surface emitting lasers , 1993 .