论文信息 - 24.2: A 1300‐dpi Optical Image Sensor Using an a‐Si:H Photo Diode Array Driven by LTPS TFTs

24.2: A 1300‐dpi Optical Image Sensor Using an a‐Si:H Photo Diode Array Driven by LTPS TFTs

We have developed a 1300-dpi optical image sensor using a hydrogenated amorphous silicon (a-Si:H) pin diode array driven by low-temperature polycrystalline silicon (LTPS) thin film transistors (TFT) on a glass substrate. This paper describes a new architecture for achieving a high-resolution optical image sensor using LTPS TFT production equipment.

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