论文信息 - Shallow Junction Ion Implantation in Ge and Associated Defect Control - 字舞流文

Shallow Junction Ion Implantation in Ge and Associated Defect Control

A. Satta | E. Simoen | M. Meuris | W. Vandervorst | A. Benedetti | B. Brijs | T. Clarysse | B. D. Jaeger | T. Janssens | I. Hoflijk