Optical spring effect in nanoelectromechanical systems

In this Letter, we report a hybrid system consisting of nano-optical and nano-mechanical springs, in which the optical spring effect works to adjust the mechanical frequency of a nanoelectromechanical systems resonator. Nano-scale folded beams are fabricated as the mechanical springs and double-coupled one-dimensional photonic crystal cavities are used to pump the “optical spring.” The dynamic characteristics of this hybrid system are measured and analyzed at both low and high input optical powers. This study leads the physical phenomenon of optomechanics in complex nano-opto-electro-mechanical systems (NOEMS) and could benefit the future applications of NOEMS in chip-level communication and sensing.

[1]  P. Deotare,et al.  Coupled photonic crystal nanobeam cavities , 2009, 0905.0109.

[2]  Fook Siong Chau,et al.  Measurement of coupled cavities' optomechanical coupling coefficient using a nanoelectromechanical actuator , 2013 .

[3]  K. Vahala,et al.  A picogram- and nanometre-scale photonic-crystal optomechanical cavity , 2008, Nature.

[4]  H. H. Tawfik,et al.  Nonlinear Dynamics of Spring Softening and Hardening in Folded-MEMS Comb Drive Resonators , 2011, Journal of Microelectromechanical Systems.

[5]  P. Deotare,et al.  Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide , 2010, 1002.1319.

[6]  Jie Deng,et al.  Energy-efficient utilization of bipolar optical forces in nano-optomechanical cavities. , 2013, Optics express.

[7]  David E. McClelland,et al.  Observation and characterization of an optical spring , 2004 .

[8]  Mo Li,et al.  Multichannel cavity optomechanics for all-optical amplification of radio frequency signals , 2012, Nature Communications.

[9]  Yu Du,et al.  Nanoelectromechanical-systems-controlled bistability of double-coupled photonic crystal cavities. , 2013, Optics letters.

[10]  Oskar Painter,et al.  Optical and mechanical design of a “zipper” photonic crystal optomechanical cavity , 2008, 2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum electronics and Laser Science Conference.

[11]  Mani Hossein-Zadeh,et al.  Observation of optical spring effect in a microtoroidal optomechanical resonator. , 2007, Optics letters.

[12]  Toshiyuki Tsuchiya,et al.  Mechanical calibration of MEMS springs with sub-micro-Newton force resolution , 2008 .

[13]  Kerry J. Vahala,et al.  Coherent mixing of mechanical excitations in nano-optomechanical structures , 2009, 0908.1128.

[14]  M. Lipson,et al.  Controlling photonic structures using optical forces , 2009, Nature.

[15]  Rob Ilic,et al.  All optical reconfiguration of optomechanical filters. , 2012, Nature communications.