A fabrication platform for electrically mediated optically active biofunctionalized sites in BioMEMS.

We report a new approach for microfluidic optical bioanalysis that is based on the electrically driven assembly of bio-components on a transparent sidewall and the optical detection of the assembled components using planar waveguides. This allows localized electrical signals for bio-assembly and optical signals for bio-detection that can easily be applied in MEMS systems. We demonstrate a BioMEMS design incorporating this scheme and its output signal when using fluorescent detection.

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