태양전지 광투과율 증대를 위한 역피라미드 결합형 마이크로 렌즈 배열의 제작

This paper describes the process of fabricating microlens array with inverted pyramid structures, that can be used to enhance light absorption efficiency on the surface of solar cells. The structure should maximize light paths by multiple reflections inside of the microlenses. We applied the embossing process to make the final structures and the mold of the inverted pyramid was prepared by photolithography and anisotropic wet etching in KOH solution. Characteristics of light absorption of the our microlens array were measured and compared with those of the designed structures.