论文信息 - Optical encoder measurement technology

Optical encoder measurement technology

A new approach to metrology for the range below 100 nm is based on large fiducial grids optical encoders produced by interference / lithography. Since the encoder can only be as accurate as the grating scale, advance in this area depends on the availability of encoder plates of nanometer accuracy. Various commercially available or home made holographic gratings were checked using interferometric methods and compared with the AFM device results. The budget of errors was analyzed and the necessary improvements of measuring technology are presented.

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