Piezoresistive Pressure Sensors

Information about pressure and its measurement by means of pressure sensors is interesting in many different application areas. Contemporary applications, as for example the automotive industry, aerospace and medical technology, require ever smaller, adaptable and highly accurate pressure sensors. Special microtechnical manufacturing processes make it possible today to react to these challenges.

[1]  S. D. Collins,et al.  Study of electrochemical etch-stop for high-precision thickness control of silicon membranes , 1989 .

[2]  Fan-Gang Tseng,et al.  Precise [100] crystal orientation determination on ⟨110⟩-oriented silicon wafers , 2003 .

[3]  F. Bloch.  Über die Quantenmechanik der Elektronen in Kristallgittern , 1929 .

[4]  Ho-Ming Tong,et al.  Advanced Flip Chip Packaging , 2013 .

[5]  Juergen Becker,et al.  Application of PVDF foils for the measurements of unsteady pressures on wind tunnel models for the prediction of aircraft vibrations , 2011 .

[6]  Knut E. Aasmundtveit,et al.  Optimized Cu-Sn Wafer-Level Bonding Using Intermetallic Phase Characterization , 2013, Journal of Electronic Materials.

[7]  Rumana Tasnim,et al.  An inductive transducer based pressure sensor for biomedical applications , 2015, 2015 International Conference on Informatics, Electronics & Vision (ICIEV).

[8]  L.D. Seneviratne,et al.  State-of-the-Art in Force and Tactile Sensing for Minimally Invasive Surgery , 2008, IEEE Sensors Journal.

[9]  Y. Kanda,et al.  A graphical representation of the piezoresistance coefficients in silicon , 1982, IEEE Transactions on Electron Devices.

[10]  J. G. E. Gardeniers,et al.  Fabrication and mechanical testing of glass chips for high-pressure synthetic or analytical chemistry , 2006 .

[11]  C. E. SHANNON,et al.  A mathematical theory of communication , 1948, MOCO.

[12]  W. Kern.  Overview and Evolution of Silicon Wafer Cleaning Technology , 2018 .

[13]  Bruce W. Smith,et al.  Microlithography : science and technology , 2020 .

[14]  J. Wortman,et al.  Young's Modulus, Shear Modulus, and Poisson's Ratio in Silicon and Germanium , 1965 .

[15]  Juerg Leuthold,et al.  Micro and nano fabrication: Tools and processes , 2015 .

[16]  Christian Robohm.  Mikrotechnische Entwicklung eines biochemischen Analysegerätes zur Blutalkoholbestimmung , 1999 .

[17]  D. Reinhoudt,et al.  Fabrication, mechanical testing and application of high-pressure glass microreactor chips , 2007 .

[18]  Stefanie Demming,et al.  Disposable Lab-on-Chip Systems for Biotechnological Screening , 2011 .

[19]  K. Reinhardt,et al.  4 – Aqueous Cleaning and Surface Conditioning Processes , 2008 .

[20]  Sabine Globisch.  Lehrbuch Mikrotechnologie: für Ausbildung, Studium und Weiterbildung , 2011 .

[21]  P. Rai-Choudhury.  Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography , 1997 .

[22]  W. Dauksher,et al.  Masks for X-ray Lithography , 2001 .

[23]  Rolf Radespiel,et al.  Fundamentals in Coanda Flap Design , 2015 .