论文信息 - Novel industrial laser etching technics for sensors miniaturization applied to biomedical: a comparison of simulation and experimental approach

Novel industrial laser etching technics for sensors miniaturization applied to biomedical: a comparison of simulation and experimental approach

An increase of industrial needs for micro-ablation and surface structuration using sub-picosecond laser working at high repetition rate is required. In this context, new industrial lasers were recently commercialized for such a type of purpose. The potential of a new industrial femtosecond laser source (Tangerine model from Amplitude Système) is investigated in this work for different etching purposes. Our experimental results will be also compared to those obtained when using Ti:Sa laser source, with the help of numerical simulations.

[1] G. Mourou,et al. Laser ablation and micromachining with ultrashort laser pulses , 1997 .

[2] Jean-Claude Diels,et al. 4 – Coherent Phenomena , 2006 .

[3] Jean-Claude Diels,et al. Ultrashort Laser Pulse Phenomena , 1996 .

[4] E. Breton,et al. 3T MRI scanner magnetic gradient mapping using a 3D Hall probe , 2012, 2012 IEEE Sensors.

[5] Brent C. Stuart,et al. Optical ablation by high-power short-pulse lasers , 1996 .

[6] P. A. Atanasov,et al. Ablation of metals by ultrashort laser pulses , 2004 .

[7] Gerard Mourou,et al. Laser‐induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs , 1994 .

[8] Michael Schmidt,et al. Metal Ablation with Short and Ultrashort Laser Pulses , 2011 .

[9] A. Guenther,et al. The relative roles of avalanche multiplication and multiphoton absorption in laser-induced damage of dielectrics , 1980 .

[10] A. Tünnermann,et al. Femtosecond, picosecond and nanosecond laser ablation of solids , 1996 .

[11] A. Rode,et al. Physics of ultra-short laser interaction with matter: From phonon excitation to ultimate transformations , 2013 .