sSOI (strained-silicon-on-insulator) 기판을 이용한 Capacitorless 1-transistor DRAM cell

We fabricated the capacitorless 1-transistor dynamic random access memory (1T-DRAM) devices based on a sSOI (strained-silicon-on- insulator) substrate. The sSOI 1T-DRAMs showed larger sensing margin and longer data retention time than the conventional SOI 1T-DRAMs.