论文信息 - Reentrant Growth in Kinetic Thin-Film Deposition on Stepped Surfaces

Reentrant Growth in Kinetic Thin-Film Deposition on Stepped Surfaces

We have studied the reentrant growth in kinetic thin-film deposition on stepped surfaces using a Monte Carlo simulation. The results show that the reentrant oscillation of two dimensional nucleation growth occurs as a result of the variation of surface diffusion length with deposition temperature, and that it is a natural phenomenon in kinetic thin-film epitaxy on a substrate with a permanent step source.

R. Xiao

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