초기 비결합된 수직빗살 전극형 정전 스캐너의 거동제어

In this paper, we describe a capacitive position sensing and motion control scheme of a MEMS scanner used for laser display application. The laser displays can be made by scanning laser beams much the same way a CRT scans electron beams. So the accuracy of the scanner motion determines the quality of the displayed image. The MEMS scanner under consideration is composed of electrostatic comb electrodes with initial gap and requires large driving voltage. Due to the under-damping and nonlinear driving characteristics, the scanner motion is subject to be an unwanted oscillation. For the linear scanner motion, we devise a differential charge amplifier and phase compensator. The experimental results show that the implemented feedback control system provides sufficient electrical damping and improves the dynamic performance of the scanner.