SU-8 MEMS Fabry-Perot pressure sensor
暂无分享,去创建一个
Beth L. Pruitt | Renata Melamud | Ginel C. Hill | P. G. Hartwell | B. Pruitt | P. Hartwell | R. Melamud | G. Hill | A. A. Davenport | F. Declercq | I. H. Chan | F. E. Declercq | A. Davenport
[1] Anbo Wang,et al. Simultaneous measurement of refractive index and temperature based on a reflection-mode long-period grating and an intrinsic Fabry-Perot interferometer sensor. , 2005, Optics letters.
[2] E. Cibula,et al. Miniature fiber-optic pressure sensor with a polymer diaphragm. , 2005, Applied optics.
[3] Rebecca S. Shawgo,et al. Biocompatibility and biofouling of MEMS drug delivery devices. , 2003, Biomaterials.
[4] Denis Donlagic,et al. Miniature fiber optic pressure sensor for medical applications , 2002, Proceedings of IEEE Sensors.
[5] E. Cibula,et al. All-fiber high-sensitivity pressure sensor with SiO2 diaphragm. , 2005, Optics letters.
[6] Anbo Wang,et al. Miniature fiber-optic pressure sensor , 2005 .
[7] Masayoshi Esashi,et al. Ultra-miniature fiber-optic pressure sensor using white light interferometry , 2005 .
[8] Peter Vettiger,et al. High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS , 1998 .
[9] Hai-Jun Yang,et al. High-precision absolute distance and vibration measurement with frequency scanned interferometry. , 2005, Applied optics.
[10] Peter Vettiger,et al. Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications , 1998 .
[11] David F. Moore,et al. Micromechanical testing of SU-8 cantilevers , 2005 .
[12] M. Laudon,et al. Mechanical characterization of a new high-aspect-ratio near UV-photoresist , 1998 .
[13] P. Vettiger,et al. Fabrication process of high aspect ratio elastic structures for piezoelectric motor applications , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[14] J. Eijkel,et al. Micromachined Fabry-Pérot interferometer with embedded nanochannels for nanoscale fluid dynamics. , 2007, Nano letters.
[15] Y. Haga,et al. MICROMACHINED 125μm DIAMETER ULTRA MINIATURE FIBER-OPTIC PRESSURE SENSOR FOR CATHETER , 2000 .
[16] D. Abeysinghe,et al. A novel MEMS pressure sensor fabricated on an optical fiber , 2001, IEEE Photonics Technology Letters.
[17] Lizhong Jiang,et al. Characterization of epoxy resin (SU-8) film using thickness-shear mode (TSM) resonator under various conditions , 2004 .