Review of Research Status and Development Trends of Wireless Passive LC Resonant Sensors for Harsh Environments

Measurement technology for various key parameters in harsh environments (e.g., high-temperature and biomedical applications) continues to be limited. Wireless passive LC resonant sensors offer long service life and can be suitable for harsh environments because they can transmit signals without battery power or wired connections. Consequently, these devices have become the focus of many current research studies. This paper addresses recent research, key technologies, and practical applications relative to passive LC sensors used to monitor temperature, pressure, humidity, and harmful gases in harsh environments. The advantages and disadvantages of various sensor types are discussed, and prospects and challenges for future development of these sensors are presented.

[1]  Cong Zhang,et al.  Design of LC-type passive wireless multi-parameter sensor , 2013, The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

[2]  Keat Ghee Ong,et al.  A Wireless, Passive Sensor for Quantifying Packaged Food Quality , 2007, Sensors.

[3]  Mark G. Allen,et al.  Wireless Ceramic Sensors Operating in High Temperature Environments , 2004 .

[4]  Goran Stojanovic,et al.  Monitoring of Water Content in Building Materials Using a Wireless Passive Sensor , 2010, Sensors.

[5]  Guozhen Chen,et al.  Capacitive contact lens sensor for continuous non-invasive intraocular pressure monitoring , 2013 .

[6]  Chen Li,et al.  Microfabrication of a Novel Ceramic Pressure Sensor with High Sensitivity Based on Low-Temperature Co-Fired Ceramic (LTCC) Technology , 2014, Micromachines.

[7]  H. A. Wheeler Simple Inductance Formulas for Radio Coils , 1928, Proceedings of the Institute of Radio Engineers.

[8]  Craig A. Grimes,et al.  A wireless, passive carbon nanotube-based gas sensor , 2002 .

[9]  W. Smetana,et al.  A Wireless Embedded Resonant Pressure Sensor Fabricated in the Standard LTCC Technology , 2009, IEEE Sensors Journal.

[10]  Yi Jia,et al.  A Passive Wireless Temperature Sensor for Harsh Environment Applications , 2008, Sensors.

[11]  M.S. Humayun,et al.  Microfabricated Implantable Parylene-Based Wireless Passive Intraocular Pressure Sensors , 2008, Journal of Microelectromechanical Systems.

[12]  M. Fonseca,et al.  Wireless micromachined ceramic pressure sensor for high-temperature applications , 2002 .

[13]  Jeong-Bong (JB) Lee,et al.  A SU-8-Based Microfabricated Implantable Inductively Coupled Passive RF Wireless Intraocular Pressure Sensor , 2012, Journal of Microelectromechanical Systems.

[14]  Junbo Wang,et al.  A readout circuit for wireless passive LC sensors and its application for gastrointestinal monitoring , 2014 .

[15]  Li Qin,et al.  A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments , 2013, Sensors.

[16]  Yunfeng Ling,et al.  A Printable CNT-Based FM Passive Wireless Sensor Tag on a Flexible Substrate With Enhanced Sensitivity , 2014, IEEE Sensors Journal.

[17]  Xiaolong Wang,et al.  A Harsh Environment-Oriented Wireless Passive Temperature Sensor Realized by LTCC Technology , 2014, Sensors.

[18]  Chao Li,et al.  A Passive Pressure Sensor Fabricated by Post-Fire Metallization on Zirconia Ceramic for High-Temperature Applications , 2014, Micromachines.

[19]  J. Mills-Beale,et al.  A Wireless, Passive Embedded Sensor for Real-Time Monitoring of Water Content in Civil Engineering Materials , 2008, IEEE Sensors Journal.

[20]  Bernard Hon,et al.  Design and modelling of a passive wireless pressure sensor , 2010 .

[21]  Michael Agapito Fonseca,et al.  Polymer/Ceramic Wireless MEMS Pressure Sensors for Harsh Environments: High Temperature and Biomedical Applications , 2007 .

[22]  Wei Liu,et al.  A Novel Interdigital Capacitor Pressure Sensor Based on LTCC Technology , 2014, J. Sensors.

[23]  R.A. Powers,et al.  Harsh environment microtechnologies for NASA and terrestrial applications , 2005, IEEE Sensors, 2005..

[24]  R.W. Johnson,et al.  The changing automotive environment: high-temperature electronics , 2004, IEEE Transactions on Electronics Packaging Manufacturing.

[25]  Craig A. Grimes,et al.  A Carbon Nanotube-based Sensor for CO2 Monitoring , 2001 .

[26]  Babak Ziaie,et al.  A Minimally Invasive Implantable Wireless Pressure Sensor for Continuous IOP Monitoring , 2011, IEEE Transactions on Biomedical Engineering.

[27]  Jijun Xiong,et al.  Wireless LTCC-based capacitive pressure sensor for harsh environment , 2013 .

[28]  S. Beeby,et al.  MEMS Mechanical Sensors , 2004 .

[29]  J. English,et al.  Wireless micromachined ceramic pressure sensors , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[30]  Wolfgang R. Fahrner,et al.  Review on materials, microsensors, systems and devices for high-temperature and harsh-environment applications , 2001, IEEE Trans. Ind. Electron..

[31]  Junbo Wang,et al.  In Vitro and In Vivo characterization of wireless and passive micro system enabling gastrointestinal pressure monitoring , 2014, Biomedical Microdevices.

[32]  Jun Liu,et al.  A noncontact wireless passive radio frequency (RF) resonant pressure sensor with optimized design for applications in high-temperature environments , 2014 .

[33]  Ville Viikari,et al.  Optimization of Wireless Sensors Based on Intermodulation Communication , 2013, IEEE Transactions on Microwave Theory and Techniques.

[34]  Y. Tai,et al.  Wireless Intraocular Pressure Sensing Using Microfabricated Minimally Invasive Flexible-Coiled LC Sensor Implant , 2010, Journal of Microelectromechanical Systems.

[35]  Wei Wang,et al.  Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology , 2013, Journal of Zhejiang University SCIENCE C.

[36]  Chen Li,et al.  Wireless Passive Temperature Sensor Realized on Multilayer HTCC Tapes for Harsh Environment , 2015, J. Sensors.

[37]  V Viikari,et al.  Intermodulation Read-Out Principle for Passive Wireless Sensors , 2011, IEEE Transactions on Microwave Theory and Techniques.

[38]  Stephen P. Boyd,et al.  Simple accurate expressions for planar spiral inductances , 1999, IEEE J. Solid State Circuits.

[39]  Leonhard M. Reindl,et al.  Wireless Readout of Passive LC Sensors , 2010, IEEE Transactions on Instrumentation and Measurement.

[40]  Ville Viikari,et al.  Passive Wireless Sensor Platform Utilizing a Mechanical Resonator , 2013, IEEE Sensors Journal.

[41]  G. Radosavljevic,et al.  Micro force sensor fabricated in the LTCC technology , 2010, 2010 27th International Conference on Microelectronics Proceedings.

[42]  Jijun Xiong,et al.  Fabrication and measurement of wireless pressure-sensitive micro-device based on high temperature co-fired ceramics technology , 2014 .