Composition and Properties Control Growth of High-Quality GaOxNy Film by One-Step Plasma-Enhanced Atomic Layer Deposition
暂无分享,去创建一个
David-Wei Zhang | T. Jen | Q. Guo | Hongliang Lu | Jingtao Zhu | Hongping Ma | Wei Huang | Peihong Cheng | Jia-He Yang | Xiao-Xi Li | Hong-Liang Lu | Xiaoxi Li