Recent advances in ion-assisted growth of Cr/Sc multilayer X-ray mirrors for the water window

Cr/Sc multilayer X-ray mirrors intended for normal incidence reflection in the water window wavelength range, ?=[2.4-4.4nm], have been grown by ion-assisted sputter deposition and characterized usi ...

[1]  J. Verhoeven,et al.  Ion bombardment of thin layers : the effect on the interface roughness and its x-ray reflectivity (invited) , 1992 .

[2]  I. Ivanov,et al.  Electrostatic Probe Measurements in the Glow Discharge Plasma of a D. C. Magnetron Sputtering System , 1988 .

[3]  David L. Windt,et al.  IMD—software for modeling the optical properties of multilayer films , 1998 .

[4]  M. Wilson,et al.  Interface processing in multilayer films , 1994 .

[5]  S. Kirkpatrick,et al.  Design, plasma studies, and ion assisted thin film growth in an unbalanced dual target magnetron sputtering system with a solenoid coil , 2000 .

[6]  J. Als-Nielsen,et al.  Elements of Modern X-ray Physics , 2001 .

[7]  M. Berglund,et al.  Compact soft x-ray reflectometer based on a line-emitting laser-plasma source , 2001 .

[8]  I. Petrov,et al.  Growth of poly- and single-crystal ScN on MgO(001): Role of low-energy N2+ irradiation in determining texture, microstructure evolution, and mechanical properties , 1998 .

[9]  G. Radnóczi,et al.  Growth and structural characterization of single-crystal (001) oriented MoV superlattices , 1990 .

[10]  B. K. Agarwal,et al.  X-Ray Spectroscopy: An Introduction , 1979 .

[11]  Quantum Dot and Hole Formation in Sputter Erosion , 2000, cond-mat/0008111.

[12]  F. Bijkerk,et al.  Angular and energy dependence of ion bombardment of Mo/Si multilayers , 1997 .

[13]  G. Gładyszewski,et al.  Ion-assisted deposition of Ag(001)/Fe(001) multilayers: interface roughness , 1998 .

[14]  W Steckelmacher,et al.  Physics of thin films , 1979 .

[15]  Kurz,et al.  Formation of Ordered Nanoscale Semiconductor Dots by Ion Sputtering. , 1999, Science.

[16]  E. Puik,et al.  Ion Etching of Thin W-Layers - Enhanced Reflectivity of W-C Multilayer Coatings , 1991 .

[17]  M. Wall,et al.  Subnanometer multilayers for x‐ray mirrors: Amorphous crystals , 1989 .

[18]  R S Rosen,et al.  Multilayer mirror technology for soft-x-ray projection lithography. , 1993, Applied optics.

[19]  L. J. Seijbel,et al.  EARLY STAGES OF IBAD-FILM GROWTH : DIFFERENCES BETWEEN (100) AND POLYCRYSTALLINE MO SUBSTRATES , 1999 .

[20]  D. Gerstenberg,et al.  Physics of Thin Films , 1964 .

[21]  Jens Birch,et al.  Enhanced quality of epitaxial AlN thin films on 6H-SiC by ultra-high-vacuum ion-assisted reactive dc magnetron sputter deposition , 2000 .

[22]  J. Kortright,et al.  X-ray optical multilayers: Microstructure limits on reflectivity at ultra-short periods , 1998 .

[23]  Kirill A. Prokhorov,et al.  Short-period X-ray multilayers based on Cr/Sc, W/Sc , 1998 .

[24]  Ivan K. Schuller,et al.  Stability of multilayers for synchrotron optics , 1986 .

[25]  R. Hoover,et al.  Soft X-ray Images of the Solar Corona with a Normal-Incidence Cassegrain Multilayer Telescope , 1988, Science.

[26]  T. Wilhein,et al.  Compact water‐window transmission X‐ray microscopy , 2000, Journal of microscopy.

[27]  H. Zabel X-ray and neutron reflectivity analysis of thin films and superlattices , 1994 .

[28]  Birch,et al.  Strain-induced growth-mode transition of V in epitaxial Mo/V(001) superlattices. , 1996, Physical review. B, Condensed matter.

[29]  N N Salashchenko,et al.  Cr /sc multilayers for the soft-x-ray range. , 1998, Applied optics.

[30]  L. Hultman,et al.  Ion irradiation effects during growth of Mo/V(001) superlattices by dual-target magnetron sputtering , 1992 .

[31]  B. L. Henke,et al.  X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92 , 1993 .

[32]  A. Engström,et al.  X-Ray Microscopy , 1961, Nature.

[33]  F. Bijkerk,et al.  Temperature induced diffusion in Mo/Si multilayer mirrors , 1998 .

[34]  B. Niemann,et al.  [X-ray microscopy]. , 1984 .

[35]  D. D. de Boer,et al.  Glancing-incidence x-ray fluorescence of layered materials , 1991 .

[36]  E. Puik,et al.  Ion-beam-assisted deposition of Ni/C multilayer X-ray mirrors , 1990 .