Mesoscale actuator device: micro interlocking mechanism to transfer macro load

Abstract A novel proof-of-concept prototype Mesoscale Actuator Device (MAD) containing microscale components has been developed. The MAD is similar to piezoelectrically driven inchworm motors with the exception that mechanically interlocking microridges replace the traditional frictional clamping mechanisms. The interlocked microridges, fabricated from single crystal silicon, are designed to increase the load carrying capability of the device substantially. Tests conducted on the current design demonstrate that interlocked microridges fabricated with 30% KOH solution support a 9.6 MPa shear stress or that a pair of 5×5 mm locked chips supports a 500 N load. For high frequency operation, an open loop control signal is implemented to synchronize the locking and unlocking of the microridges with the elongating and contracting of the actuator. The system was successfully operated from 0.2 Hz to 500 Hz (or speeds from 2 μm/s to 5 mm/s). The upper limit (500 Hz) is imposed by software and hardware limitations and not related to physical limitations of the prototype device.

[1]  Masayoshi Esashi,et al.  Design of the electrostatic linear microactuator based on the inchworm motion , 1995 .

[2]  D. Polla,et al.  A linear piezoelectric stepper motor with submicrometer step size and centimeter travel range , 1990, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[3]  Khanh Duong,et al.  Design and Performance of a Rotary Motor Driven by Piezoelectric Stack Actuators , 1996 .

[4]  J. Connally,et al.  Slow Crack Growth in Single-Crystal Silicon , 1992, Science.

[5]  J. W. Murdock,et al.  A unified analysis of both active and passive damping for a plate with piezoelectric transducers , 1993 .

[6]  Ephrahim Garcia,et al.  A Self-Sensing Piezoelectric Actuator for Collocated Control , 1992 .

[7]  Michael Goldfarb,et al.  Modeling Piezoelectric Stack Actuators for Control of Mlcromanlpulatlon , 2022 .

[8]  H. Janocha,et al.  Smart actuators with piezoelectric materials , 1996, Other Conferences.

[9]  Jan Söderkvist,et al.  Characterization of an inchworm prototype motor , 1994 .

[10]  Inderjit Chopra,et al.  Design and testing of a helicopter trailing edge flap with piezoelectric stack actuators , 1996, Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.

[11]  A. Heuberger,et al.  Anisotropic Etching of Crystalline Silicon in Alkaline Solutions I . Orientation Dependence and Behavior of Passivation Layers , 1990 .

[12]  Peretz P. Friedmann,et al.  Vibration reduction in rotorcraft using active control - A comparison of various approaches , 1995 .

[13]  Håkan Olin,et al.  Design of a scanning probe microscope , 1994 .

[14]  T. R. Hicks,et al.  The application of capacitance micrometry to the control of Fabry-Perot etalons , 1984 .

[15]  William P. Robbins,et al.  Ferroelectric-based microactuators , 1995 .

[16]  Dhananjay K. Samak,et al.  Design of high-force high-displacement actuators for helicopter rotors , 1994, Smart Structures.

[17]  Yasuroh Iriye,et al.  Characterization of anisotropic etching properties of single-crystal silicon: effects of KOH concentration on etching profiles , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.

[18]  Henry B. Waites,et al.  Self-sensing control as applied to a PZT stack actuator used as a micropositioner , 1994 .

[19]  John E. Miesner,et al.  Piezoelectric/magnetostrictive resonant inchworm motor , 1994, Smart Structures.

[20]  Bi Zhang,et al.  Design of an inchworm-type linear piezomotor , 1994, Smart Structures.