论文信息 - WGDM-7 Preliminary comparison on nanometrology According to the rules of CCL key comparisons - 字舞流文

WGDM-7 Preliminary comparison on nanometrology According to the rules of CCL key comparisons

Physikalisch-Technische Bundesanstalt

[1] Jens Fluegge,et al. Status of the nanometer comparator at PTB , 2001, Lasers in Metrology and Art Conservation.

[2] J. Flugge. Concept of an Interferometric Length Comparator with Measurement Uncertainties in the Nanometer Range , 1999 .