论文信息 - Effect of pre-implanted oxygen in Si on the retention of implanted He - 字舞流文

Effect of pre-implanted oxygen in Si on the retention of implanted He

A. R. Ramos | Z. Zolnai | B. Pécz | E. Szilágyi | F. Pászti | N. Q. Khánh | A. Manuaba | A. Tunyogi