Recent developments of piezoelectric motors with diverse operating principles

Abstract This article presents an extensive review of the developments in the field of piezoelectric motors involving different operational concepts. The review is carried out for ultrasonic motors and surface acoustic wave motors using resonant vibrations of piezoelectric substrates. The traditional upbringings of ultrasonic motors using standing and travelling waves along with surface acoustic wave driven motors are presented. Further this research work gives a scope to understand the recent development of various driving principles and different characteristics of piezoelectric motors.

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