High-speed and high-precision table positioning system by using mode switching control
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Nobuyuki Matsui | R. Iwasaki | K. Sakai | K. Sakai | N. Matsui | R. Iwasaki
[1] Osamu Nakao. Hardware Technology for Information Equipments. High Speed and High Accuracy Positioning Technology for Electronic Component Placement Machine. , 1996 .
[2] Shigeru Futami,et al. State Space Trajectory Tracking Control for Fast Nanometer Positioning , 1993 .
[3] Katsunobu Ueda,et al. Precision dual-positioning system , 1990, Optics & Photonics.
[4] S. Futami,et al. Nanometer positioning and its micro-dynamics , 1990 .
[5] Masayoshi Tomizuka,et al. Adaptive Pulse Width Control for Precise Positioning Under the Influence of Stiction and Coulomb Friction , 1988 .
[6] Yoshihiro Kawase,et al. Ultra-Precision Positioning Using Lead Screw Drive (1st Report) , 1990 .
[7] Raymond Hanus,et al. Anti-windup, bumpless, and conditioned transfer techniques for PID controllers , 1996 .
[8] Tatsuo Harada,et al. Precision X-Y stage with a Piezodriven fine-table , 1988 .