论文信息 - Doping Dependence of Thermal Oxidation on n-Type 4H-SiC - 字舞流文

Doping Dependence of Thermal Oxidation on n-Type 4H-SiC

T. Sudarshan | M. Chandrashekhar | F. Zhao | B. Daas | M. Islam | I. Chowdhury