Fabrication of three-dimensional microstructures based on singled-layered SU-8 for lab-on-chip applications

This paper introduces a novel 3D manufacturing approach to the rapid processing of microfluidic components such as embedded channels and microvalves, using a scanning laser system. Compared to existing manufacturing techniques, our direct UV laser writing method greatly simplifies fabrication processes, potentially reducing the design-to-fabrication time to a few hours, which is extremely beneficial during the product development stages. The initial process validation has been presented by using SU-8 material. With the fine-tuning of the laser processing parameters, the depth of SU-8 polymerization can be controlled. This paper also describes the underlying theory and method to determine the Young's modulus of the exposed SU-8 material by using a laser acoustic microscopy system. The laser-based ultrasonic technique offers a non-contact, nondestructive means of evaluation and materials characterization. More importantly, it allows for local inspection of material properties. The results presented in this paper potentially could serve as the first crucial step towards the rapid manufacturing of microdevices for lab-on-chip applications.

[1]  John L. Crassidis,et al.  Sensors and actuators , 2005, Conference on Electron Devices, 2005 Spanish.

[2]  L.J. Guerin,et al.  Simple and low cost fabrication of embedded micro-channels by using a new thick-film photoplastic , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[3]  D. J. Harrison,et al.  Capillary electrophoresis and sample injection systems integrated on a planar glass chip , 1992 .

[4]  W. Ehrfeld,et al.  Microreactor with Integrated Static Mixer and Analysis System , 1995 .

[5]  M. Wanke,et al.  Laser Rapid Prototyping of Photonic Band-Gap Microstructures , 1997, Science.

[6]  Francis E. H. Tay,et al.  A novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels , 2001 .

[7]  Daniel Bertrand,et al.  Buried microchannels in photopolymer for delivering of solutions to neurons in a network , 1998 .

[8]  G. S. Taylor,et al.  Laser-generated ultrasound: its properties, mechanisms and multifarious applications , 1993 .

[9]  M.A. Burns,et al.  Integrated microfabricated devices for genetic assays , 1999, Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference.

[10]  RAPID MANUFACTURING OF EMBEDDED MICROCHANNELS FROM A SINGLE LAYERED SU-8, AND DETERMINING THE DEPENDENCE OF SU-8 YOUNG'S MODULUS ON , 2005 .

[11]  M. A. Northrup,et al.  Functional integration of PCR amplification and capillary electrophoresis in a microfabricated DNA analysis device. , 1996, Analytical chemistry.

[12]  Photo-electroforming: 3-D geometry and materials flexibility in a MEMS fabrication process , 1999 .

[13]  S. Jacobson,et al.  Integrated microdevice for DNA restriction fragment analysis. , 1996, Analytical chemistry.

[14]  Olaf Lehmann,et al.  Laser-Driven Movement of Three-Dimensional Microstructures Generated by Laser Rapid Prototyping , 1995, Science.

[15]  Robin H. Liu,et al.  Development of integrated microfluidic system for genetic analysis , 2003 .

[16]  S. Zissi,et al.  Stereolithography and microtechniques , 1996 .

[17]  Wei-Keng Lin,et al.  A novel fabrication method of embedded micro-channels by using SU-8 thick-film photoresists , 2003 .

[18]  Seth R. Marder,et al.  Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication , 1999, Nature.

[19]  R S Foote,et al.  Microchip device for cell lysis, multiplex PCR amplification, and electrophoretic sizing. , 1998, Analytical chemistry.