Using neural network to predict reliability of lithography machine

Dual-stage lithography machine is still in the prototype development stage and it is meaningful to study its reliability. Since this kind of machine is very stable, there are not enough failure data and adequate available samples for us during the analysis process. Considering these factors, this paper will take advantage of similar equipment method and neural network to predict the reliability of lithography machine. An example of lithography machine was given to verify this method. The result can guide designers to improve their design process.