Determination of Zr and Ti in 3-μm-Thick ZrTiN Ceramic Coating Using Laser Ablation Inductively Coupled Plasma Atomic Emission Spectrometry

Analysis of 3-μm-thick ZrN, TiN, and ZrTiN ceramic coatings on a high-speed steel substrate by laser ablation inductively coupled plasma atomic emission spectrometry (LA-ICP-AES) is described. A Nd:YAG laser was used in the Q-switched mode and operated at 355 nm and 5 mJ. Ablation patterns were obtained on the target surface by moving the ablation chamber with respect to the laser beam by means of an X-Y translator. Control of the depth of penetration was obtained by successively performing a limited number of cycles. Transient signals were obtained and their peak areas were used for the construction of calibration graphs based on the concentrations determined by energy-dispersive X-ray (EDX) analysis. An erosion rate of 0.1 μm per cycle was observed. Crater shape and depth, temporal behavior, and reproducibility of the signals are described.

[1]  J. Kasl,et al.  Properties of TiN, ZrN and ZrTiN coatings prepared by cathodic arc evaporation , 1993 .

[2]  A. T. Smith,et al.  Depth Profile Studies Using Laser-Induced Plasma Emission Spectrometry , 1995 .

[3]  J. Musil,et al.  Depth Profiling of Thick Layers of Graded Metal—Zirconia Ceramic Coatings Using Laser Ablation Inductively Coupled Plasma Atomic Emission Spectrometry , 1997 .

[4]  Z. Weiss.  Quantitative evaluation of depth profiles analysed by glow discharge optical emission spectroscopy: analysis of diffusion processes , 1992 .

[5]  Julian F. Tyson,et al.  Interaction of laser radiation with solid materials and its significance to analytical spectrometry: a review , 1993 .

[6]  W. Fischer,et al.  Quantitative depth profiling of oxide scales on high-temperature alloys by means of glow discharge optical emission spectrometry , 1992 .

[7]  J. Mermet,et al.  Analysis of glass by UV laser ablation inductively coupled plasma atomic emission spectrometry. Part 2. Analytical figures of merit , 1996 .

[8]  L. Lelait,et al.  T.E.M. investigations of high toughness non-equilibrium phases in the ZrO2-Y2O3 system , 1991 .

[9]  J. Mermet,et al.  Analysis of glass by UV laser ablation inductively coupled plasma atomic emission spectrometry. Part 1. Effects of the laser parameters on the amount of ablated material and the temporal behaviour of the signal for different types of laser , 1996 .

[10]  A. Eklund,et al.  Further improvements in calibration techniques for depth profiling with glow discharge optical emission spectrometry , 1990 .