论文信息 - Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH4 gas - 字舞流文

Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH4 gas

L. Jastrabík | J. Suchánek | O. Bláhová | V. Vorlíček | V. Kulikovsky | P. Bohác | R. Čtvrtlík