X-ray diffuse scattering in multilayer nanostructures

The theory is presented for the resonant diffuse scattering in multilayer nanostructures. The dynamic diffraction effects are taken into account. The computational simulation was constructed from this theory and results are presented and discussed. The angular spectra of the diffuse scattering intensity have been measured experimentally. These results confirm the decisive influence of the dynamic diffraction effects on the process of the resonant diffuse scattering.