论文信息 - Pulsed excimer laser ablation deposition of YSZ and TiN/YSZ thin films on Si substrates - 字舞流文

Pulsed excimer laser ablation deposition of YSZ and TiN/YSZ thin films on Si substrates

A. Luches | P. Mengucci | M. Martino | G. Majni | A. Caricato | G. Leggieri | M. Fernández | A. D. Cristoforo