MIM HfO/sub 2/ low leakage capacitors for eDRAM integration at interconnect levels
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Yves Morand | Gilles Reimbold | Serge Blonkowski | S. Descombes | Alexis Farcy | Pascale Mazoyer | François Martin | N. Bicais | Joaquim Torres | J.-F. Damlencourt | F. Mondon
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