论文信息 - Vertical Drive Micro Actuator Using SMA Thin Film For A Smart Button

Vertical Drive Micro Actuator Using SMA Thin Film For A Smart Button

This paper presents the performance of a shape memory alloy (SMA) thin film micro-actuator for a small tactile display to reproduce an object texture to a fingertip. Maximum displacement of 30 μm under 4.2 mN load with an actuator length of 1 mm, which fulfills the minimum requirements for reproducing a texture to a fingertip, is realized by the newly proposed SMA thin film actuator structure.

[1] Quan Zhou,et al. 2008 International Symposium on Micro-Nano Mechatronics and Human Science (MHS2008), Nagoya, Japan, November 6-9, 2008 , 2008 .

[2] 野間春生,et al. Symposium on Haptic Interfaces for Virtual Environment and Teleoperator Systems 参加報告 , 1997 .

[3] Akira Ishida,et al. Effects of Composition and Annealing on Shape Memory Behavior of Ti-Rich Ti-Ni Thin Films Formed by Sputtering. , 2001 .

[4] Masayoshi Esashi,et al. Dynamic Braille display using SMA coil actuator and magnetic latch , 2005 .

[5] O. Tabata,et al. Bimorph-Type Microactuator using TiNi Shape-Memory Thin Film , 2002 .

[6] Takayuki Shibata,et al. Electrochemical Photoetching of Rolled Shape Memory Alloy Sheets for Microactuators , 1998 .