The structures of semifluorinated alkanethiol self-assembled monolayers (SAMs) generated by the adsorption of CF3(CF2)9(CH2)nSH (F10HnSH, n = 2, 6, 11, 17, 33) onto gold were investigated with atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), and surface plasmon resonance spectroscopy. Images obtained by AFM of the F10H2SH SAM showed a remarkably ordered 2D hexagonal lattice with a lattice constant, a = 5.9 ± 0.1 A, on Au(111)/mica. As the total number of carbon atoms in the alkyl spacer groups (n) was increased, the fluorocarbon adlayer structure appeared more disordered in the AFM images; however, the thicknesses of the fluorocarbon layers estimated from the C 1s (CF3), C 1s (CF2), and F 1s XPS signal intensities were indistinguishable in all of the SAMs. In contrast, the C 1s (CH2) signals revealed that the tilt angles of the alkyl spacer groups depended strongly on n. We utilized a contrast variation SPR technique with various contacting media for an independent determination of t...