论文信息 - Control method of linear motor drive table using observer for the vibration repression

Control method of linear motor drive table using observer for the vibration repression

The vibration of moving parts deteriorates control performance in linear motor drive tables. The paper proposes a control method for a linear motor drive table using an observer of vibration suppression. The suppression of the vibration of moving parts becomes possible by feedback of the vibration element. The effect was confirmed by simulation and experiment.

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