Simulation Of A Complex Sensor System Using Coupled Simulation Programs

The increasing complexity of microsystems, which include coupled partial systems basing on very different physical principles such as electronics, mechanics, optics or fluids, demands new modelling and simulation, -strategies. Especially to include the coupling effects Of such partial systems, in this paper a new simulation strategy is introduced. This strategy bases on the modelling of partial systems in different, appropriate simul,ation programs, which are coupled to simulate the behaviour of the whole system. The strategy is demonstrated at the example of the mechano-clectronic system of an resonant beam force sensor.