论文信息 - InGaAsP/InP Based Flattened Ring Resonators with Etched Beam Splitters

InGaAsP/InP Based Flattened Ring Resonators with Etched Beam Splitters

A novel flattened ring resonator design utilizing Etched Beam Splitters (EBS) in InGaAsP/InP is purposed and demonstrated. A multiple-thickness hard mask that compensates for RIE-lag realizes waveguides and EBS in a single etch step.

Larry A. Coldren | Robert S. Guzzon | Erik J. Norberg | Uppili Krishnamachari | John S. Parker

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