Micro Electro Mechanical System Design

Table of INTRODUCTION Historical Perspective The Development of MEMS Technology MEMS: Present and Future MEMS Challenges The Aim of This Book Questions References FABRICATION PROCESSES Materials Starting Material - Substrates Physical Vapor Deposition (PVD) Chemical Vapor Deposition (CVD) Etching Processes Patterning Wafer Bonding Annealing Chemical Mechanical Polishing (CMP) Material Doping Summary Questions References MEMS TECHNOLOGIES Bulk Micromachining LIGA Sacrificial Surface Micromachining Integration of Electronics and MEMS Technology (IMEMS) Technology Characterization Alternative MEMS Materials Summary Questions References SCALING ISSUES FOR MEMS Scaling of Physical Systems Computational Issues of Scale Fabrication Issues of Scale Material Issues Newly Relevant Physical Phenomena Summary Questions References DESIGN REALIZATION TOOLS FOR MEMS Layout SUMMiT(TM) Technology Layout Design Rules Standard Components MEMS Visualization MEMS Analysis Summary Questions References ELECTROMECHANICS Structural Mechanics Damping Electrical System Dynamics Questions References MODELING AND DESIGN Design Synthesis Modeling Lagrange's Equations Numerical Modeling Design Uncertainty Problems References MEMS SENSORS AND ACTUATORS MEMS Actuators MEMS Sensing Questions References PACKAGING Packaging Process Steps Packaging Case Studies Summary Questions References RELIABILITY Reliability Theory and Terminology Essential Aspects of Probability and Statistics for Reliability Reliability Models MEMS Failure Mechanisms Measurement Techniques for MEMS Operational, Reliability and Failure Analysis Testing MEMS Reliability and Design MEMS Reliability Case Studies Summary Questions References APPENDIX Glossary Prefixes Micro-MKS Conversions Physical Constants Material Properties Stiffness Coefficients of Frequently Used MEMS Flexures Common MEMS Cross-Section Properties Design Synthesis Software and Files