Accuracy improvement of phase shift interferometry

An approach to improve the accuracy of phase-shift interferometry is presented. In this paper, an algorithm for estimating phase shift step errors is demonstrated. The algorithm is based on the fact that the sinusoidal intensity data from the same pixels of two interferograms with different phase shifts form an elliptic Lissajous curve. The elliptic Lissajous curve can be fitted by the least squares method from which the phase shift steps can be accurately estimated. The estimated phase shift step errors are then compensated to measure 3D topography of specimen. In addition, the approach provides a simple technique of measuring 3D topography without sophisticated actuation mechanism. Simulations and experiments also demonstrate that the intensity noise in interferograms provides very small effect on the accuracy of the algorithm.

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