Optimization of auxetic structures for MEMS applications

Complex inertial Micro Electro Mechanical Systems (MEMS) usually require the simultaneous motion of the masses in more than one direction and an overall linear behavior. Furthermore, since it is usually very difficult to actuate the device in all the required directions, complex spring configurations for the conversion of the motion are needed. Here we present possible solutions to this problem through auxetic structures. The goal of the work is to propose a new topology optimization procedure which can be used as a tool during the design phase of the optimal auxetic structure, that is completely compatible with the MEMS fabrication processes available so far and that allows the motion conversion in a MEMS device without entering the nonlinear regime.

[1]  A. Alderson,et al.  Auxetic materials , 2007 .

[2]  A. Eringen,et al.  LINEAR THEORY OF MICROPOLAR ELASTICITY , 1965 .

[3]  Umar Ansari,et al.  Review of Mechanics and Applications of Auxetic Structures , 2014 .

[4]  James C. Weaver,et al.  Dimpled elastic sheets: a new class of non-porous negative Poisson’s ratio materials , 2015, Scientific Reports.

[5]  I. Goldfarb,et al.  Design considerations for negative Poisson ratio structures under large deflection for MEMS applications , 2006 .

[6]  Andrés Díaz Lantada,et al.  Comparative study of auxetic geometries by means of computer-aided design and engineering , 2012 .

[7]  David Elata,et al.  Selective Stiffening for Producing Motion Conversion Mechanisms , 2014 .

[8]  Ole Sigmund,et al.  On the Design of Compliant Mechanisms Using Topology Optimization , 1997 .

[9]  Katia Bertoldi,et al.  Hierarchical honeycomb auxetic metamaterials , 2015, Scientific Reports.

[10]  Katia Bertoldi,et al.  Design of planar isotropic negative Poisson’s ratio structures , 2015 .

[11]  Joseph N. Grima,et al.  Auxetic behaviour from rotating rigid units , 2005 .

[12]  O. Sigmund,et al.  Design and fabrication of compliant micromechanisms and structures with negative Poisson's ratio , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[13]  S. LynchChristopher,et al.  リラクサ強誘電体8/65/35PLZTとオルセンサイクルを用いる焦電廃熱エネルギー回収 | 文献情報 | J-GLOBAL 科学技術総合リンクセンター , 2012 .

[14]  Jongmin Shim,et al.  3D Soft Metamaterials with Negative Poisson's Ratio , 2013, Advanced materials.

[15]  Benedetto Vigna.  Tri-axial MEMS gyroscopes and Six Degree-Of-Freedom Motion Sensors , 2011, 2011 International Electron Devices Meeting.

[16]  Juan Carlos,et al.  Comparative study of auxetic geometries by means of computer-aided design and engineering , 2012 .

[17]  Zhong‐Ming Li,et al.  Review on auxetic materials , 2004 .