Detection of yield trends

This paper proposes a yield data filtration procedure. This procedure is intended for the reduction of noise in the yield data. Such a reduction is a key step in the detection of yield trends that have to be known for yield modeling and yield analysis purposes.

[1]  Wojciech Maly,et al.  Design for manufacturability in submicron domain , 1996, Proceedings of International Conference on Computer Aided Design.

[2]  Wojciech Maly,et al.  Yield estimation model for VLSI artwork evaluation , 1983 .

[3]  C.H. Stapper,et al.  Integrated circuit yield statistics , 1983, Proceedings of the IEEE.

[4]  John G. Proakis,et al.  Probability, random variables and stochastic processes , 1985, IEEE Trans. Acoust. Speech Signal Process..

[5]  Bruno O. Shubert,et al.  Random variables and stochastic processes , 1979 .

[6]  Charles H. Stapper,et al.  Modeling of Defects in Integrated Circuit Photolithographic Patterns , 1984, IBM J. Res. Dev..

[7]  Wojciech Maly,et al.  CAD at the design-manufacturing interface , 1997, DAC.