Analysis of the measurement range in Fizeau phase-stepping interferometry using the moire effect

In this work, the phase evaluation of multiple-beam Fizeau interferograms is carried out by the usual phase-stepping algorithms by superimposing the interferogram on a Ronchi grid located at the interferometer image plane. The phase modulation, required for phase measurement, is obtained by translating the grid in its own plane, while a slight defocusing in the image acquisition system provides a suitable sinusoidal intensity pattern. An estimation of the measurable range of surface slopes is calculated and experiments on a spherical surface have been realized in order to analyze the validity of the obtained results.

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