Fabrication of biomimic GaAs subwavelength grating structures for broadband and angular-independent antireflection

Abstract We combine interferometric lithography and inductively coupled plasma etching to fabricate GaAs subwavelength grating (SWG) which mimics the moth eye structures. Through the modification of morphology parameters, including profile, height and packing fraction, tapered, high-aspect-ratio and closely-packed GaAs SWGs are obtained. The measurement of spectral reflectance of the fabricated SWGs shows that reflection has been dramatically reduced compared to the polished GaAs surface. Particularly, the optimized SWG structures exhibit an average reflection below 5% in the wavelengths ranging from 350 to 900 nm. Furthermore, the angular-independent property is demonstrated by measuring the reflectance versus varying angles of incidence at 532 and 632.8 nm wavelengths.

[1]  L. Cescato,et al.  Developed profile of holographically exposed photoresist gratings. , 1995, Applied optics.

[2]  L. Johnson,et al.  Generation of periodic surface corrugations. , 1978, Applied optics.

[3]  M. Hutley,et al.  Reduction of Lens Reflexion by the “Moth Eye” Principle , 1973, Nature.

[4]  D. Stavenga,et al.  Light on the moth-eye corneal nipple array of butterflies , 2006, Proceedings of the Royal Society B: Biological Sciences.

[5]  G. Michael Morris,et al.  Antireflection behavior of silicon subwavelength periodic structures for visible light , 1997 .

[6]  Lucila Cescato,et al.  SiO2 single layer for reduction of the standing wave effects in the interference lithography of deep photoresist structures on Si , 2006, Microelectron. J..

[7]  Steven R. J. Brueck,et al.  Optical and Interferometric Lithography - Nanotechnology Enablers , 2005, Proceedings of the IEEE.

[8]  K. Hane,et al.  Broadband antireflection gratings fabricated upon silicon substrates. , 1999, Optics letters.

[9]  Tow Chong Chong,et al.  Fabrication of nanostructures with laser interference lithography , 2008 .

[10]  J. Yu,et al.  Closely packed and aspect-ratio-controlled antireflection subwavelength gratings on GaAs using a lenslike shape transfer. , 2009, Optics letters.

[11]  Stuart A. Boden,et al.  Tunable reflection minima of nanostructured antireflective surfaces , 2008 .

[12]  Chong-Long Ho,et al.  High-Speed InGaP/GaAs p-i-n Photodiodes With Wide Spectral Range , 2007, IEEE Electron Device Letters.

[13]  Mehmet Acet,et al.  Reflection properties of nanostructure-arrayed silicon surfaces , 2000 .

[14]  S. Brueck,et al.  High aspect-ratio holographic photoresist gratings. , 1988, Applied optics.

[15]  Hung-chun Chang,et al.  Design of optical path for wide-angle gradient-index antireflection coatings. , 2007, Applied optics.

[16]  N. P. Economou,et al.  A simple technique for modifying the profile of resist exposed by holographic lithography , 1981 .

[17]  Yoshiaki Kanamori,et al.  Antireflective subwavelength structures on crystalline Si fabricated using directly formed anodic porous alumina masks , 2006 .

[18]  Jr-hau He,et al.  Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings. , 2009, Journal of applied physics.

[19]  Guan-Yu Chen,et al.  Fabrication and measurement of large-area sub-wavelength structures with broadband and wide-angle antireflection effect , 2010 .

[20]  Chang‐Hwan Choi,et al.  Fabrication of a dense array of tall nanostructures over a large sample area with sidewall profile and tip sharpness control , 2006 .

[21]  Carlos Algora,et al.  A GaAs solar cell with an efficiency of 26.2% at 1000 suns and 25.0% at 2000 suns , 2001 .

[22]  Young Min Song,et al.  Antireflective submicrometer gratings on thin-film silicon solar cells for light-absorption enhancement. , 2010, Optics letters.

[23]  Peng Jiang,et al.  Templated fabrication of large area subwavelength antireflection gratings on silicon , 2007 .

[24]  C. Mack.  Development of Positive Photoresists , 1987 .

[25]  Peng Jiang,et al.  Biomimetic subwavelength antireflective gratings on GaAs. , 2008, Optics letters.