Optimization of the drive circuit for the sensitivity-enhanced film bulk acoustic resonator

An optimal drive circuit for the sensitivity-enhanced film bulk acoustic resonator (SE-FBAR) has been presented in this paper. The SE-FBAR is made of a thin ZnO piezoelectric film sandwiched by two electrodes. The drive circuit started with a kind of Parallel Feedback Pierce circuit (common-base Clapp driving circuit) in which the Modified Butterworth-Van Dyke (MBVD) equivalent circuit of FABR is used. By theoretically calculating, it is proved that there is a minimal capacitance that makes the load quality factor of FABR QL has the maximal value. After simulation in Advanced Design System (ADS), it is shown that the drive circuit worked at the resonant frequency 1.488GHz.