Subnanometer Positioning and Drift Compensation With Tunneling Current

This paper introduces tunneling current as a sensor to detect and control the displacements of micro- and nanoelectromechanical systems. Because of its extremely small magnitude, the tunneling current cannot be used without an appropriate control strategy. A control methodology involving two feedback loops is proposed to control displacements with an accuracy of 40 pm while also compensating the sensor drift. With this strategy, controlling displacements with an amplitude is possible, extending the predicted capabilities of tunneling current by the literature. The overall approach is a solution for the control of macro to nano systems and may be embedded in positioning applications requiring a very high degree of accuracy.

[1]  M. Blencowe.  Nanoelectromechanical systems , 2005, cond-mat/0502566.

[2]  S.O.R. Moheimani,et al.  Achieving Subnanometer Precision in a MEMS-Based Storage Device During Self-Servo Write Process , 2008, IEEE Transactions on Nanotechnology.

[3]  S O Reza Moheimani,et al.  Making a commercial atomic force microscope more accurate and faster using positive position feedback control. , 2009, The Review of scientific instruments.

[4]  Satoshi Sugita,et al.  Origin of low frequency noise and 1/f fluctuations of tunneling current in scanning tunneling microscopes , 1996 .

[5]  Ioan Doré Landau,et al.  Digital Control Systems , 2014 .

[6]  Charles Meunier.  [High precision]. , 2008, Perspective infirmiere : revue officielle de l'Ordre des infirmieres et infirmiers du Quebec.

[7]  Karl Johan Åström,et al.  Adaptive Control , 1989, Embedded Digital Control with Microcontrollers.

[8]  H. Grange,et al.  Thin SQI NEMS accelerometers compatible with In-IC integration , 2006, 2006 5th IEEE Conference on Sensors.

[9]  Murti V. Salapaka,et al.  Design, identification and control of a fast nanopositioning device , 2002, Proceedings of the 2002 American Control Conference (IEEE Cat. No.CH37301).

[10]  I. D. Landau.  Robust digital control of systems with time delay (the Smith predictor revisited) , 1995 .

[11]  A. Oliva,et al.  Analysis of scanning tunneling microscopy feedback system , 1995 .

[12]  D. Croft,et al.  Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application , 2001 .

[13]  Santosh Devasia,et al.  A Survey of Control Issues in Nanopositioning , 2007, IEEE Transactions on Control Systems Technology.

[14]  Jing Wang,et al.  A micromachined wide-bandwidth magnetic field sensor based on all-PMMA electron tunneling transducer , 2006, IEEE Sensors Journal.

[15]  Ian Postlethwaite,et al.  Multivariable Feedback Control: Analysis and Design , 1996 .

[16]  G. Capolino,et al.  Dynamic and static responses of a piezoelectric actuator at nanometer scale elongations , 2000, Conference Record of the 2000 IEEE Industry Applications Conference. Thirty-Fifth IAS Annual Meeting and World Conference on Industrial Applications of Electrical Energy (Cat. No.00CH37129).

[17]  Kok Kiong Tan,et al.  Design, Modeling, and Control of Piezoelectric Actuators for Intracytoplasmic Sperm Injection , 2007, IEEE Transactions on Control Systems Technology.

[18]  A. Isidori.  Nonlinear Control Systems , 1985 .

[19]  M. Bocko.  The scanning tunneling microscope as a high‐gain, low‐noise displacement sensor , 1990 .

[20]  Santosh Devasia,et al.  Guest Editorial Introduction to the Special Issue on Dynamics and Control of Micro- and Nanoscale Systems , 2007 .

[21]  Srinivasa M. Salapaka,et al.  Design methodologies for robust nano-positioning , 2005, IEEE Transactions on Control Systems Technology.

[22]  Alina Voda,et al.  The tunnel current as a subnanometer motion sensor , 2009, 2009 European Control Conference (ECC).

[23]  C. J. Chen,et al.  Introduction to Scanning Tunneling Microscopy , 1993 .

[24]  C. Gerber,et al.  Surface Studies by Scanning Tunneling Microscopy , 1982 .

[25]  K. Ekinci.  Electromechanical transducers at the nanoscale: actuation and sensing of motion in nanoelectromechanical systems (NEMS). , 2005, Small.

[26]  T. Kenny,et al.  Wide-bandwidth electromechanical actuators for tunneling displacement transducers , 1994 .

[27]  Alina Voda,et al.  Pull-in control during nanometric positioning by near field position sensing , 2008, 2008 47th IEEE Conference on Decision and Control.

[28]  J. H. Makaliwe,et al.  Manipulation of nanoscale components with the AFM: principles and applications , 2001, Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516).

[29]  Thomas W. Kenny,et al.  A high-precision, wide-bandwidth micromachined tunneling accelerometer , 2001 .

[30]  Jim Euchner.  Design , 2014, Catalysis from A to Z.

[31]  Ja-Yong Koo,et al.  A low-noise and wide-band ac boosting current-to-voltage amplifier for scanning tunneling microscopy , 2005 .

[32]  B. Bhikkaji,et al.  Integral Resonant Control of a Piezoelectric Tube Actuator for Fast Nanoscale Positioning , 2008, IEEE/ASME Transactions on Mechatronics.

[33]  W. Marsden.  I and J , 2012 .