구조물의 유연성을 고려한 고정밀 스테이지의 동적 해석

In this study, kinematic motion simulation of a imprinting machine using FEM and flexible multi-body dynamics is presented. Structural components as the upper plate and the rotator are modelled with finite elements to analyze flexibility effects during the precision stage motion. In this paper flexible multi-body dynamic simulation is executed to support robust design of the precision stage mechanism.