Active isolation of electronic micro-components with piezoelectrically transduced silicon MEMS devices

Thin PZT films have a major interest for active control of mechanical structures. Precisely, it is an open field for the isolation of micro-components sensitive to dynamic effects. Indeed, the electronic components used, for example, in aircraft endure intense vibrations due to acceleration. These vibrations have some disturbing effects on the frequency stability and on the usable life of the electronic elements. The isolation of these elements becomes crucial to protect them from the vibrating environment. In order to manage this problem, it is advisable to isolate the electronic card either at the case level or at the card level or at the sensitive element level. The latter solution was chosen. Thus, we have direct access to the control electronics and the energy sources and the control energy is lower. An active suspension system is developed between the support and the sensitive element to be isolated. An original active suspension system is designed. Some modeling difficulties arise due to the existence of the inevitable bottom electrode common to the actuating layers and to the sensing layer.