Monolithic integration of a spot size transformer with a planar buried heterostructure InGaAsP/InP-laser using the shadow masked growth technique

We present a vertically tapered InGaAsP/InP planar buried heterostructure (PBB) laser for low loss coupling to single-mode fibers. To achieve the vertical tapering we make use of the shadow masked growth technique. Tapered lasers with beam divergences of 15/spl deg/ in both lateral and transverse directions were realized. In comparison with untapered lasers, the coupling losses to cleaved single-mode fibers could be reduced by 4.8 dB down to 5.8 dB.<<ETX>>

[1]  S. Fischer,et al.  Simple and low-loss fibre-to-chip coupling by integrated field-matching waveguide in InP , 1993 .

[2]  Yoshio Noguchi,et al.  Spot size convertors using InP/InAlAs multiquantum well waveguides for low-loss singlemode fibre coupling , 1992 .

[3]  B. Stegmuller,et al.  Tapered InP/InGaAsP waveguide structure for efficient fibre-chip coupling , 1991 .

[4]  Richard J. Black,et al.  Tapered single-mode fibres and devices. I. Adiabaticity criteria , 1991 .

[5]  Robert J. Deri,et al.  Dynamic etch mask technique for fabricating tapered semiconductor optical waveguides and other structures , 1990 .

[6]  H. Melchior,et al.  Integrated optical modeshape adapters in InGaAsP/InP for efficient fiber-to-waveguide coupling , 1993, IEEE Photonics Technology Letters.

[7]  O. Mitomi,et al.  A simple laterally tapered waveguide for low-loss coupling to single-mode fibers , 1993, IEEE Photonics Technology Letters.

[8]  U. Koren,et al.  Short-cavity distributed Bragg reflector laser with an integrated tapered output waveguide , 1991, IEEE Photonics Technology Letters.

[9]  Nicholas C. Andreadakis,et al.  Integrated optic mode‐size tapers by selective organometallic chemical vapor deposition of InGaAsP/InP , 1992 .

[10]  A. Kohl,et al.  Low-loss fibre-chip coupling by buried laterally tapered InP/InGaAsP waveguide structure , 1992 .

[11]  P. Demeester,et al.  Atmospheric and low pressure shadow masked MOVPE growth of InGaAs(P)/InP and (In)GaAs/(Al)GaAs heterostructures and quantum wells , 1994 .

[12]  Piet Demeester,et al.  Growth velocity variations during metalorganic vapor phase epitaxy through an epitaxial shadow mask , 1990 .

[13]  Ingrid Moerman,et al.  Influence of gas mixing on the lateral uniformity in horizontal MOVPE reactors , 1991 .

[14]  U. Koren,et al.  Tapered waveguide InGaAs/InGaAsP multiple-quantum-well lasers , 1990, IEEE Photonics Technology Letters.

[15]  Yasuhiro Kondo,et al.  Monolithically integrated DBR lasers with simple tapered waveguide for low-loss fibre coupling , 1993 .